Laser device

Abstract

PURPOSE: To correct the optical deviation of a total reflection mirror from a partial reflection mirror without executing the detection of light in the waveguide of a laser resonator by a method wherein a servomotor and a micrometer head are driven basing on the deviation of the total reflection mirror and the partial reflection mirror from a set position obtained by the detection beam from a laser diode. CONSTITUTION: A laser diode 13A is fixed to a mirror holder 10 which holds a partial reflection mirror 2, a laser diode 13B is fixed to a mirror holder 11 which holds a total reflection mirror 1, laser rays 7A and 7B emitted from the laser diodes 13A and 13B are made to impinge on light position detectors 18A and 18B. A control device 20 calculates the deviation of the total reflection mirror 1 and the partial reflection mirror 2 from the reference set position basing on the detection signals concerned. When it is found that they deviate from the reference set position, control signals which correct the deviation in the direction of X and Y axis are inputted into encoders 15A, 15B, 15C, and 15D, and the total reflection mirror 1 and the partial reflection mirror 2 are corrected in deviation from the reference set position through the rectilinear displacement of them in axial directions by the rotation of the micrometer heads 10A, 10B, 11A, and 11B. COPYRIGHT: (C)1992,JPO&Japio

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